Seminar Title: NEMS/MEMS Based Sensor Technologies
Dr. Han Huang
Senior Lecturer and Director of Nanomechanical Testing Laboratory,
School of Engineering, The University of Queensland, QLD 4072, Australia

Abstract
Microelectronic integrated circuits that have changed our lifestyle in the past two decades can be thought of as the "brains" of a system and nano/micro-electro-mechanical systems (NEMS/MEMS) augments this decision-making capability with "eyes" and "arms", to allow the system to sense and control the environment. The core to any NEMS/MEMS based sensor technology is the development of suitable structural materials. In particular, genetic low temperature technologies for fabricating ultra-thin films are required for the new generation MEMS.

This seminar will introduce the NEMS/MEMS infrared detector under developing, the mechanical design and optimization of Fabry-Perot (FP) filter structures used in the detector and the characterization of the structural MEMS materials.


About the Speaker:

Dr Han Huang received his Bachelor and Master’s degree in manufacturing engineering at Huazhong University of Science and Technology (HUST). He later obtained his PhD in mechanical and materials engineering and completed his postdoctoral work at the University of Western Australia (UWA). From 1997 to 2003, he worked as a scientist in Singapore Institute of Manufacturing Technology, where he completed a number of industrial and collaborative projects in micro/precision manufacturing. Since 2003, he started to work on NEMS/MEMS-based sensor technology and nano/micro machining. Dr. Huang is now a senior lecturer at The University of Queensland and has also been awarded as Australian Research Fellow since 2005. He has authored and co-authored two book chapters and more than 80 technical papers, over 60 of them published in referred international journals. He was the recipient of the prestigious Singapore National Technology Award in 1999 for his contributions in robotic grinding and polishing. His research interests include nano/micro machining, high efficiency grinding, ecologically friendly machining, ultra precision grinding and polishing, robotic machining, testing, modeling and characterization of nanostructured materials and nano/micro structures and NEMS/MEMS-based sensor technologies.

 

主持人:郑玉峰 教授
时 间: 9月9日(周五) 下午14:00 -16:00
地 点: 北京大学工学院力学楼四楼434大教室